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Author Kenneth A Goldberg

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Kevin T McVary, Marc C Gittelman, Kenneth A Goldberg, Kalpesh Patel, Neal D Shore, Richard M Levin, Marc Pliskin, J Randolf Beahrs, David Prall, Jed Kaminetsky, Barrett E Cowan, Christopher H Cantrill, Lance A Mynderse, James C Ulchaker, Nicholas N Tadros, Steven N Gange, Claus G Roehrborn,

J Urol (The Journal of urology)
[2021, :101097JU000000000000177803]

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Final 5-Year Outcomes of the Multicenter Randomized Sham-Controlled Trial of a Water Vapor Thermal Therapy for Treatment of Moderate to Severe Lower Urinary Tract Symptoms Secondary to Benign Prostatic Hyperplasia.

Kevin T McVary, Marc C Gittelman, Kenneth A Goldberg, Kalpesh Patel, Neal D Shore, Richard M Levin, Marc Pliskin, J Randolf Beahrs, David Prall, Jed Kaminetsky, Barrett E Cowan, Christopher H Cantrill, Lance A Mynderse, James C Ulchaker, Nicholas N Tadros, Steven N Gange, Claus G Roehrborn,

<h4>Purpose</h4>We present final 5-year outcomes of the multicenter randomized sham-controlled trial of a water vapor therapy (Rezūm™) for treatment of moderate to severe lower urinary tract symptoms due to benign prostatic hyperplasia.<h4>Materials and methods</h4>A total of 197 subjects <u>></u>50 years of age with International Prostate Symptom Score ≥13, maximum flow ... Read more >>

J Urol (The Journal of urology)
[2021, :101097JU0000000000001778]

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Pseudo-gray-scale halftone gratings for shearing and Hartmann wavefront sensors.

Kenneth A Goldberg,

Now in use on x-ray beamlines worldwide, shearing interferometry and Hartmann wavefront sensing provide effective feedback for measuring and optimizing high-quality beams. Conventionally, both approaches spatially modulate the beam properties (amplitude or phase) using two-tone, binary patterns, leading to deleterious diffraction effects that must be mitigated. In shearing, the presence ... Read more >>

Opt Lett (Optics letters)
[2021, 46(4):729-732]

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Binary Amplitude Reflection Gratings for X-ray Shearing and Hartmann Wavefront Sensors.

Kenneth A Goldberg, Antoine Wojdyla, Diane Bryant,

New, high-coherent-flux X-ray beamlines at synchrotron and free-electron laser light sources rely on wavefront sensors to achieve and maintain optimal alignment under dynamic operating conditions. This includes feedback to adaptive X-ray optics. We describe the design and modeling of a new class of binary-amplitude reflective gratings for shearing interferometry and ... Read more >>

Sensors (Basel) (Sensors (Basel, Switzerland))
[2021, 21(2):]

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Reflective binary amplitude grating for soft x-ray shearing and Hartmann wavefront sensing.

Kenneth A Goldberg, Diane Bryant, Antoine Wojdyla, Michael Helmbrecht, Eric Gullikson,

We demonstrate a reflective wavefront sensor grating suitable for the characterization of high-quality x-ray beamlines and optical systems with high power densities. Operating at glancing incidence angles, the optical element is deeply etched with a two-level pattern of shearing interferometry gratings and Hartmann wavefront sensor grids. Transverse features block unwanted ... Read more >>

Opt Lett (Optics letters)
[2020, 45(17):4694-4697]

Cited: 1 time

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Compensation of heat load deformations using adaptive optics for the ALS upgrade: a wave optics study.

Manuel Sanchez Del Rio, Antoine Wojdyla, Kenneth A Goldberg, Grant D Cutler, Daniele Cocco, Howard A Padmore,

A realistic wave optics simulation method has been developed to study how wavefront distortions originating from heat load deformations can be corrected using adaptive X-ray optics. Several planned soft X-ray and tender X-ray insertion-device beamlines in the Advanced Light Source upgrade rely on a common design principle. A flat, first ... Read more >>

J Synchrotron Radiat (Journal of synchrotron radiation)
[2020, 27(Pt 5):1141-1152]

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Adaptive shape control of wavefront-preserving X-ray mirrors with active cooling and heating.

Daniele Cocco, Corey Hardin, Daniel Morton, Lance Lee, May Ling Ng, Lin Zhang, Lahsen Assoufid, Walan Grizolli, Xianbo Shi, Donald A Walko, Grant Cutler, Kenneth A Goldberg, Antoine Wojdyla, Mourad Idir, Lei Huang, Guillaume Dovillaire,

This article describes the development and testing of a novel, water-cooled, active optic mirror system (called "REAL: Resistive Element Adjustable Length") that combines cooling with applied auxiliary heating, tailored to the spatial distribution of the thermal load generated by the incident beam. This technique is theoretically capable of sub-nanometer surface ... Read more >>

Opt Express (Optics express)
[2020, 28(13):19242-19254]

Cited: 1 time

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Extreme ultraviolet microscope characterization using photomask surface roughness.

Gautam Gunjala, Antoine Wojdyla, Stuart Sherwin, Aamod Shanker, Markus P Benk, Kenneth A Goldberg, Patrick P Naulleau, Laura Waller,

We demonstrate a method for characterizing the field-dependent aberrations of a full-field synchrotron-based extreme ultraviolet microscope. The statistical uniformity of the inherent, atomic-scale roughness of readily-available photomask blanks enables a self-calibrating computational procedure using images acquired under standard operation. We characterize the aberrations across a 30-um field-of-view, demonstrating a minimum ... Read more >>

Sci Rep (Scientific reports)
[2020, 10(1):11673]

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Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging.

Patrick P Naulleau, Markus Benk, Kenneth A Goldberg, Eric M Gullikson, Antoine Wojdyla, Yow-Gwo Wang, Andy Neureuther,

It is now well established that extreme ultraviolet (EUV) mask multilayer roughness leads to wafer-plane line-width roughness (LWR) in the lithography process. Analysis and modeling done to date has assumed, however, that the roughness leading to scatter is primarily a phase effect and that the amplitude can be ignored. Under ... Read more >>

Appl Opt (Applied optics)
[2017, 56(12):3325-3328]

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Convective Thermal Therapy: Durable 2-Year Results of Randomized Controlled and Prospective Crossover Studies for Treatment of Lower Urinary Tract Symptoms Due to Benign Prostatic Hyperplasia.

Claus G Roehrborn, Steven N Gange, Marc C Gittelman, Kenneth A Goldberg, Kalpesh Patel, Neal D Shore, Richard M Levin, Michael Rousseau, J Randolf Beahrs, Jed Kaminetsky, Barrett E Cowan, Christopher H Cantrill, Lance A Mynderse, James C Ulchaker, Thayne R Larson, Christopher M Dixon, Kevin T McVary,

<h4>Purpose</h4>We report 2-year outcomes of a multicenter randomized controlled trial plus 1-year results of a crossover trial after treatment with convective radiofrequency water vapor thermal energy for lower urinary tract symptoms due to benign prostatic hyperplasia.<h4>Materials and methods</h4>A total of 197 men at least 50 years old with I-PSS (International ... Read more >>

J Urol (The Journal of urology)
[2017, 197(6):1507-1516]

Cited: 18 times

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Response and Rebuttal to Editorial Commentary on "Erectile and Ejaculatory Function Preserved With Convective Water Vapor Energy Treatment of Lower Urinary Tract Symptoms Secondary to Benign Prostatic Hyperplasia: Randomized Controlled Study".

Kevin T McVary, Steven N Gange, Marc C Gittelman, Kenneth A Goldberg, Kalpesh Patel, Neal D Shore, Richard M Levin, Michael Rousseau, J Randolf Beahrs, Jed Kaminetsky, Barrett E Cowan, Christopher H Cantrill, Lance A Mynderse, James C Ulchaker, Thayne R Larson, Christopher M Dixon, Claus G Roehrborn,

J Sex Med (The journal of sexual medicine)
[2016, 13(6):936-937]

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Optimized mirror shape tuning using beam weightings based on distance, angle of incidence, reflectivity, and power.

Kenneth A Goldberg, Valeriy V Yashchuk,

For glancing-incidence optical systems, such as short-wavelength optics used for nano-focusing, incorporating physical factors in the calculations used for shape optimization can improve performance. Wavefront metrology, including the measurement of a mirror's shape or slope, is routinely used as input for mirror figure optimization on mirrors that can be bent, ... Read more >>

Rev Sci Instrum (The Review of scientific instruments)
[2016, 87(5):051805]

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Erectile and Ejaculatory Function Preserved With Convective Water Vapor Energy Treatment of Lower Urinary Tract Symptoms Secondary to Benign Prostatic Hyperplasia: Randomized Controlled Study.

Kevin T McVary, Steven N Gange, Marc C Gittelman, Kenneth A Goldberg, Kalpesh Patel, Neal D Shore, Richard M Levin, Michael Rousseau, J Randolf Beahrs, Jed Kaminetsky, Barrett E Cowan, Christopher H Cantrill, Lance A Mynderse, James C Ulchaker, Thayne R Larson, Christopher M Dixon, Claus G Roehrborn,

<h4>Introduction</h4>Most surgical treatments for male lower urinary tract symptoms and benign prostatic hyperplasia affect erectile and ejaculatory functions negatively, leading to patient dissatisfaction.<h4>Aim</h4>To determine whether water vapor thermal therapy, when conducted in a randomized controlled trial, would significantly improve lower urinary tract symptoms secondary to benign prostatic hyperplasia and urinary ... Read more >>

J Sex Med (The journal of sexual medicine)
[2016, 13(6):924-933]

Cited: 22 times

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Minimally Invasive Prostate Convective Water Vapor Energy Ablation: A Multicenter, Randomized, Controlled Study for the Treatment of Lower Urinary Tract Symptoms Secondary to Benign Prostatic Hyperplasia.

Kevin T McVary, Steven N Gange, Marc C Gittelman, Kenneth A Goldberg, Kalpesh Patel, Neal D Shore, Richard M Levin, Michael Rousseau, J Randolf Beahrs, Jed Kaminetsky, Barrett E Cowan, Christopher H Cantrill, Lance A Mynderse, James C Ulchaker, Thayne R Larson, Christopher M Dixon, Claus G Roehrborn,

<h4>Purpose</h4>This report reveals the results of a multicenter, randomized, controlled study using transurethral prostate convective water vapor thermal energy to treat lower urinary tract symptoms associated with benign prostatic hyperplasia.<h4>Materials and methods</h4>Men 50 years old or older with an International Prostate Symptom Score of 13 or greater, maximum flow rate ... Read more >>

J Urol (The Journal of urology)
[2016, 195(5):1529-1538]

Cited: 39 times

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Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source.

Kenji Yamazoe, Iacopo Mochi, Kenneth A Goldberg,

The wavefront retrieval by gradient descent algorithm that is typically applied to coherent or incoherent imaging is extended to retrieve a wavefront from a series of through-focus images by partially coherent illumination. For accurate retrieval, we modeled partial coherence as well as object transmittance into the gradient descent algorithm. However, ... Read more >>

J Opt Soc Am A Opt Image Sci Vis (Journal of the Optical Society of America. A, Optics, image science, and vision)
[2014, 31(12):B34-43]

Cited: 1 time

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Electro-optical system for scanning microscopy of extreme ultraviolet masks with a high harmonic generation source.

Patrick P Naulleau, Christopher N Anderson, Erik H Anderson, Nord Andreson, Weilun Chao, Changhoon Choi, Kenneth A Goldberg, Eric M Gullikson, Seong-Sue Kim, Donggun Lee, Ryan Miyakawa, Jongju Park, Seno Rekawa, Farhad Salmassi,

A self-contained electro-optical module for scanning extreme ultraviolet (EUV) reflection microscopy at 13.5 nm wavelength has been developed. The system has been designed to work with stand-alone commercially available EUV high harmonic generation (HHG) sources through the implementation of narrowband harmonic selecting multilayers and off-axis elliptical short focal length zoneplates. ... Read more >>

Opt Express (Optics express)
[2014, 22(17):20144-20154]

Cited: 2 times

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Optical modeling of Fresnel zoneplate microscopes.

Patrick P Naulleau, Iacopo Mochi, Kenneth A Goldberg,

Defect free masks remain one of the most significant challenges facing the commercialization of extreme ultraviolet (EUV) lithography. Progress on this front requires high-performance wavelength-specific metrology of EUV masks, including high-resolution and aerial-image microscopy performed near the 13.5 nm wavelength. Arguably the most cost-effective and rapid path to proliferating this capability ... Read more >>

Appl Opt (Applied optics)
[2011, 50(20):3678-3684]

Cited: 4 times

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Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks.

Fernando Brizuela, Sergio Carbajo, Anne Sakdinawat, David Alessi, Dale H Martz, Yong Wang, Bradley Luther, Kenneth A Goldberg, Iacopo Mochi, David T Attwood, Bruno La Fontaine, Jorge J Rocca, Carmen S Menoni,

We have realized the first demonstration of a table-top aerial imaging microscope capable of characterizing pattern and defect printability in extreme ultraviolet lithography masks. The microscope combines the output of a 13.2 nm wavelength, table-top, plasma-based, EUV laser with zone plate optics to mimic the imaging conditions of an EUV ... Read more >>

Opt Express (Optics express)
[2010, 18(14):14467-14473]

Cited: 3 times

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Lithographic characterization of the spherical error in an extreme-ultraviolet optic by use of a programmable pupil-fill illuminator.

Patrick P Naulleau, Jason P Cain, Kenneth A Goldberg,

Extreme-ultraviolet (EUV) lithography remains a leading contender for use in the mass production of nanoelectronics at the 32 nm node. Great progress has been made in all areas of EUV lithography, including the crucial issue of fabrication of diffraction-limited optics. To gain an accurate understanding of the projection optic wavefront ... Read more >>

Appl Opt (Applied optics)
[2006, 45(9):1957-1963]

Cited: 0 times

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Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography.

Patrick P Naulleau, Kenneth A Goldberg, Phil Batson, Jeffrey Bokor, Paul Denham, Senajith Rekawa,

Scanning illumination systems provide for a powerful and flexible means for controlling illumination coherence properties. Here we present a scanning Fourier synthesis illuminator that enables microfield extreme ultraviolet lithography to be performed on an intrinsically coherent synchrotron undulator beamline. The effectiveness of the system is demonstrated through a variety of ... Read more >>

Appl Opt (Applied optics)
[2003, 42(5):820-826]

Cited: 5 times

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Hartmann wave-front measurement at 13.4 nm with lambdaEUV/120 accuracy.

Pascal Mercère, Philippe Zeitoun, Mourad Idir, Sébastien Le Pape, Denis Douillet, Xavier Levecq, Guillaume Dovillaire, Samuel Bucourt, Kenneth A Goldberg, Patrick P Naulleau, Senajith Rekawa,

We report, for the first time to our knowledge, experimental demonstration of wave-front analysis via the Hartmann technique in the extreme ultraviolet range. The reference wave front needed to calibrate the sensor was generated by spatially filtering a focused undulator beam with 1.7- and 0.6-microm-diameter pinholes. To fully characterize the ... Read more >>

Opt Lett (Optics letters)
[2003, 28(17):1534-1536]

Cited: 18 times

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Fourier transform interferometer alignment method.

Kenneth A Goldberg, Patrick Naulleau, Jeffrey Bokor,

A rapid and convenient method has been developed to facilitate the alignment of the image-plane components of point-diffraction interferometers, including the phase-shifting point-diffraction interferometer. In real time, the Fourier transform of the detected image is used to calculate a pseudoimage of the electric field in the image plane of the ... Read more >>

Appl Opt (Applied optics)
[2002, 41(22):4477-4483]

Cited: 3 times

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